@phdthesis{oai:oka-pu.repo.nii.ac.jp:00002430,
 author = {須藤, 治生},
 month = {2021-04-26, 2021-04-26},
 note = {2020},
 school = {岡山県立大学大学院},
 title = {超高温急速熱処理がSiウェーハ中の点欠陥と格子欠陥の挙動に与える影響},
 year = {}
}